Key Features:
Ultra-thin TEM specimens with minimal amorphization and intermixing
Removal of surface contamination and Ga-implanted zones for pure STEM analysis
Seamless in-situ TEM lamella preparation within FIB-SEM
Recipe-based automated processing for reproducible and efficient workflows
Integrated STEM-in-SEM for quality endpoint inspection
Why Choose TESCAN Aura™?
TESCAN Aura™ enables precise post-FIB TEM specimen polishing inside the FIB-SEM vacuum chamber, minimizing degradation risks and streamlining your workflow. Designed for researchers demanding the highest sample quality, this solution ensures optimal results for even the most challenging materials.
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