Pioneering Perspectives in Material Sciences

Oxygen-Enhanced Milling for FIB-SEM: Cleaner, Faster, More Precise

Written by TESCAN FIB-SEM TEAM | May 6, 2025 7:30:36 AM

Unlock a New Level of Performance in Carbon-Based and Sensitive Materials

 

The TESCAN OptiGIS O₂ module introduces a powerful enhancement to the FIB-SEM workflow by leveraging targeted oxygen gas injection. When combined with the TESCAN Mistral™ plasma FIB, this system enables:

  • Faster Milling
    Achieve up to 50% faster material removal in carbonaceous substrates—ideal for polymers, composites, and resin-embedded samples.

  • Superior Surface Quality
    Reduce carbon redeposition and surface contamination, significantly improving SEM imaging clarity and consistency.

  • Selective Control in Non-Carbon Materials
    For materials such as silicon and aluminum, OptiGIS O₂ enables precision slowing of milling rates, allowing researchers to fine-tune shape and depth without compromising resolution.

  • Plug-and-Play Integration
    Seamlessly upgrade your existing TESCAN plasma FIB-SEM platform with minimal downtime or calibration.

Case Highlight:
In comparative imaging of epoxy-resin-embedded tissue, oxygen-enhanced milling using OptiGIS O₂ revealed smoother surfaces and clearer features—outperforming xenon-only techniques in both speed and imaging quality.

 

 See How Oxygen-Enhanced Milling Transforms FIB-SEM Performance

 

 

Thank you for Your interest.